Advanced Imaging

High-end optical imaging is one of Nova's key core technologies. As part of its comprehensive offering, Nova has implemented advanced image processing algorithms, sophisticated navigational channels, and robust pattern recognition capabilities.

Benefits

• Advanced image processing for micron-scale characterization

  The optical resolution of typical optical microscopes is limited by light diffraction to sub-micron resolution. Nova’s advanced image processing algorithms allow for greatly improved precision in characterizing elements with known geometry.

• Sophisticated in situ navigation channel

  To enable measurement of a required location with micron-level accuracy, Nova implements an in-situ navigation channel and advanced pattern recognition capabilities.

• Robust pattern recognition algorithms

  Nova systems utilize advanced pattern recognition algorithms to locate the system position on the wafer. These algorithms utilize a geometrical concept that creates a model of the feature’s geometry.

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