Nova metrology solutions are based on state-of-the-art technological developments in varied fields of expertise. From high-throughput and robust integrated metrology solutions to the latest 3D device structures, Nova’s technologies enable the company to measure with high reliability and accuracy. Since its inception in 1993, Nova has continually delivered innovative solutions for the semiconductor manufacturing industry.
As part of our technology innovation program, Nova’s team members publish papers on key areas of research and development. To see a comprehensive list of our publications, click here.
Over the years, Nova’s technological innovations have created an intellectual property portfolio with over 100 patents. To get more information about Nova’s patent portfolio, click here.