Scatterometry Modeling Software

Since its introduction more than a decade ago, scatterometry has made significant progress towards maturity. Today scatterometry can measure embedded details and critical profile parameters of complex 3D device structures. Reliable measurements of such details, which are practically invisible by any other technique, make scatterometry an indispensable instrument for both device development and process control.

Advanced process development is characterized by frequent changes to structures and metrology requirements. Scatterometry solutions have to keep up by providing fast and accurate profile information. By speeding up recipe creation and allowing timely device profile measurements, NovaMARS metrology modeling software engine delivers the power of scatterometry and shortens the process development cycle.

Benefits

• Combine data from multiple optical channels

  The NovaMARS® (Metrology Analysis & Recipe Setup) scatterometry engine has the ability to combine data from multiple optical channels directly on the tool during measurement.

• Holistic metrology approach

  Provide the most comprehensive algorithmic solution for scatterometry application development by injecting additional information such as multi-stack and global fit

• Easy-to-use-solution

  NovaMARS® provides an automatic and easy-to-use solution for advanced structure modeling and application development for the most complex 2D/3D device structures in the complex technology nodes.

• Process Oriented Modeling Flexibility (POMF)

  Built - in reliability and adaptability enabling process engineers to develop their own scatterometry solutions, keeping the details of their process within the FAB.

• Metrology solution for advanced 2D and 3D structures –

  NovaMARS® meets the industry demanding needs for 2D and 3D test scatterometry target and in-die measurements, optimizing metrology tool performance and significantly shortening the application development cycle.

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