The Nova T500 is a high-productivity metrology platform designed to address the unique challenges of the semiconductor manufacturing industry. This powerful platform delivers increased sampling rates and advanced metrology capabilities for 22nm and below. The T500 is part of Nova’s fleet solution for semiconductor manufacturers; with the Nova T600 measuring advanced technology nodes and the Nova T500 providing a highly efficient and effective solution for mainstream devices.
With a robust architecture, the Nova T500 delivers extremely low variability and superior tool-to-tool matching enabling you to monitor and track every sensitive parameter throughout the various steps in the process. It is designed to effectively meet the process control needs of advanced, mainstream applications such as trench etch, via etch, copper CMP back end and more.
The Nova T500 features 2 measuring units delivering extremely high throughput of while providing consistently high-accuracy measurements. The advance platform enables high-end Integrated Circuits (IC) manufacturers to increase metrology sampling and improve metrology precision, while reducing metrology cost of ownership (CoO).
Highest throughput solution
Modular Metrology™ platform
Designed for advanced tech nodes
Superior tool-to-tool matching
Extendibility to future metrology
Robust platform – high reliability hardware architecture