The Nova T600 is a high accuracy, stand-alone optical CD platform that addresses the compound challenges facing the semiconductor manufacturing industry.
It is part of Nova’s fleet solution for semiconductor manufacturers; with the Nova T600 measuring advanced technology nodes and the Nova T500 providing a highly efficient and effective solution for mainstream devices.
The Nova T600 and NovaMARS provide a complete metrology solution for advanced 2D/3D devices such as FinFET and vertical NAND using multi-channel measurements to enhance accuracy. By combining spectroscopic reflectrometry and scatterometry, the Nova T600 measures critical dimensions (CD) in complex layer stacks.
- Trench depth
- Photoresist shape
- Double patterning structures
- 3D structures ( VNAND , FinFET)
With a robust architecture, the Nova T600 delivers extremely low variability and superior tool-to-tool matching enabling you to monitor and track every sensitive parameter throughout the various steps in the process. The Nova T600 combines high-accuracy measurements and high throughput to ensure quality while increasing your efficiency.
The Nova T600 advanced design paves the way for Fabs to continue to support future innovations as they occur—enabling them consistently stay ahead of the competition. The modular platform is designed to support next generation 1x nm technology nodes and complex new semiconductor devices.
High reliability hardware architecture
Unique optical configuration
Normal and oblique Reflectometry
Six channels of information - N + O + Azimuth 0/90 (2 polarizations)
Static optics for improved uniformity
Efficient productivity and metrology optimization.
Modularity and extendibility
Scale-as-you-grow architecture enabling Fabs increase their investment in WIP and sampling as needed
Modular foundation designed support future innovations